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The Effect of Ru Substitution on the Electrical and Humidity Sensor Properties of Semiconductor Tin Oxide Film
(Afyon Kocatepe Üniversitesi, 2014)
In this study, pure SnO2 and Ru-SnO2 thin films were deposited on Si and glass substrates via sol-gel
technique for humidity sensor applications. Transparent solutions were prepared from Sn and Ru based
precursors. The ...